Sputtering Targets for Large Area & Industrial Applications

Materion’s large area rotatable and planar sputtering targets meet production requirements for uniformity, reproducibility and homogeneity for a variety of markets, including glass, automotive, electronic, semiconductor, photovoltaic and display coatings. In addition to our  precious and non-precious metal targets, we are experts in silver and silver alloys with custom alloy compositions available to ensure PVD thin film coatings with consistent phase content and refined grain size.

Materion's sputtering target expertise and extensive material control result in:

• Unique designs and forms to reduce cost and increase uptime
• Size and design customization up to 13.2 ft length (4 meters)
• Fine-grained targets that deliver uniform thin film coating
• Ceramic and inorganic targets with customized chemistries
• High-purity source materials with superior surface cleanliness

Key Materials

SPUTTERING TARGET TYPES

We offer specialty targets that address the mass production challenges of thin film coating of large surface areas for residential or architectural glass.

• Large-Area Sputtering Targets are custom designed for optimal large area thin film coating coverage
• Rotatable Sputtering Targets provide higher material utilization using cylindrical targets
• Proprietary CORA® material
• Precious metal (Au, Pt) rotatable targets  

MORE ON CORA

Our CORA material is a corrosion-resistant silver alloy sputtering target used in the manufacture of OLED flat-panel screens, video and automotive displays, and transflective displays. This durable material comes in a range of sizes with small grain. This in turn enhances the luminance and longevity of screen displays, delivering highly uniform film properties over large form factors and increasing yield. Our CORA targets are available as rotatable and as large planar targets with 43 sqft (4 sqm) plane area.

Precious Metal Targets for Hydrogen Production

As the hydrogen economy grows, physical vapor deposition is playing an important role in improving the performance and durability of polymer electrolyte membrane (PEM) electrolyzers. Materion's high-quality precious metal sputtering targets, including platinum and gold rotary targets, enable thin-film coatings that enhance electrical conductivity, improve corrosion resistance, and help protect critical components from corrosion and hydrogen embrittlement. Combined with our precious metal management, recycling, and reclaiming capabilities, we help customers optimize material utilization while reducing the total cost of ownership for large-scale hydrogen production systems.

Learn how PVD improves PEM electrolyzer performance.